


| Laser wavelength | 355nm |
| Laser power | 5W@10KHz |
| Repetition rate | 8-15KHz |
| Cutting depth | 0.05mm-0.4mm |
| Cutting width | 0.02mm-0.05mm |
| Cutting speed | 10-100mm/s |
| Positioning accuracy | ±0.005mm |
| X/Y-axis repeating positioning accuracy | ±0.002mm |
| Running accuracy | ±0.001° |
| Total power | 4KW |
| Optical system dimensions (L×W×H) | 1850mm×1300mm×2000mm |
| Cooling system (L×W×H) | 343mm×650mm×715mm |
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| Wafer cutting sample |